Effect of NO 2 Gas Adsorption on Electrical Properties of Pyrolyzed Polymer
作者： Keisuke Naka , Takeshi Hashishin , Jun Tamaki , Satoshi Konishi
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摘要: This paper deals with a pyrolyzed polymer as kind of carbon materials obtained by pyrolysis polymers. Through combination micromachining polymers and following process, we can obtain MEMS structures for various applications. work focuses on the effect NO2 gas adsorption electrical properties The resistance sensor is dramatically decreased when exposed to gas. It found that low temperature high operating contribute higher sensitivity against mixture NO2.
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