Chapter 4 - Development of a Multiscale Strategy and Application to Chemical Vapor Deposition

摘要: Abstract This chapter presents some multiscale approaches for process design. To illustrate the methodology, authors employ zinc sulfide (ZnS) deposition in a chemical vapor (CVD) reactor from two points of view. The first point view employs deterministic and multiphysics modeling approach that uses detailed physics associated equations. allows mechanistic understanding process. second agent-based simulation which is inherently captured through pseudo evolutionary random events involving molecules or particles. Here, traditional sacrificed. However, different kind introduced one observes emergence patterns behavior are consistent with an expectation what happens CVD reactor. challenge to consider synergistic effects marrying both types when studying systems this nature. also jump-off bridging scales, namely length time.