Electromechanical semiconductor transducer
作者： Yuji Yagi , Hiroyuki Sakaki , Hiroyuki Kano
DOI:
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摘要: There is disclosed an electromechanical semiconductor transducer which composed of a substrate first compound and layers second to fifth semiconductors grown on the substrate. The contains at least one element such as aluminum, gallium, arsenic selected from Groups III V periodic table. converts mechanical strain into electrical signals.
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