Effects of polyimide layer under electrical contact pads on the response bandwidth of UTC-PD

作者: Siwei Sun , Song Liang , Hongliang Zhu

DOI: 10.1117/12.2295708

关键词:

摘要: … high speed evanescently coupled waveguide UTC-PD. It is shown that a layer of polymer layer under the electrical pads can enlarge the response bandwidth of a UTC-PD greatly. The …

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