Laser-enhanced selective TiO2 deposition on Si
作者： Krisztián Kordás , Andrea Edit Pap , Seppo Leppävuori
DOI: 10.1016/S0257-8972(02)00821-6
关键词:
摘要: A novel additive deposition method for the fabrication of TiO2 micro-patterns is demonstrated in this paper. Thin (<1 μm) and narrow (∼3 titanium oxide/hydroxide deposits on Si wafers were realized using laser direct writing gel films solutions, respectively. By post-annealing laser-written patterns (derived from gel) a furnace, turned into stochiometric TiO2. The obtained micro-structures characterized by SEM/EDX AFM.
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sci-hub.se 参考文章(22)
C.E. Lee, H.F. Taylor, Interferometric optical fibre sensors using internal mirrors Electronics Letters. ,vol. 24, pp. 193- 194 ,(1988) , 10.1049/EL:19880128
J. Bellessa, S. Rabaste, J. C. Plenet, J. Dumas, J. Mugnier, O. Marty, Eu3+-doped microcavities fabricated by sol–gel process Applied Physics Letters. ,vol. 79, pp. 2142- 2144 ,(2001) , 10.1063/1.1405427
C.-E. Lee, R.A. Atkins, H.F. Taylor, Reflectively tapped optical fibre transversal filters Electronics Letters. ,vol. 23, pp. 596- 598 ,(1987) , 10.1049/EL:19870428
H Lin, H Kozuka, T Yoko, Preparation of TiO2 films on self-assembled monolayers by sol–gel method Thin Solid Films. ,vol. 315, pp. 111- 117 ,(1998) , 10.1016/S0040-6090(97)00759-1
C.C. Trapalis, M.A. Karakassides, G. Kordas, X. Aslanoglou, Study of a multilayer wavelength-selective reflector prepared by the sol-gel process Materials Letters. ,vol. 25, pp. 265- 269 ,(1995) , 10.1016/0167-577X(95)00183-2
Marijan Gotić, Mile Ivanda, Andreja Sekulić, Svetozar Musić, Stanko Popović, Aleksandra Turković, Krešimir Furić, None, Microstructure of nanosized TiO2 obtained by sol-gel synthesis Materials Letters. ,vol. 28, pp. 225- 229 ,(1996) , 10.1016/0167-577X(96)00061-4
K. Kordás, J. Békési, R. Vajtai, L. Nánai, S. Leppävuori, A. Uusimäki, K. Bali, Thomas F. George, G. Galbács, F. Ignácz, P. Moilanen, Laser-assisted metal deposition from liquid-phase precursors on polymers Applied Surface Science. ,vol. 172, pp. 178- 189 ,(2001) , 10.1016/S0169-4332(00)00852-7
Dong Jin Kim, Sung Hong Hahn, Sung Hoon Oh, Eui Jung Kim, Influence of calcination temperature on structural and optical properties of TiO2 thin films prepared by sol–gel dip coating Materials Letters. ,vol. 57, pp. 355- 360 ,(2002) , 10.1016/S0167-577X(02)00790-5
Masahiro Terashima, Narumi Inoue, Shigeru Kashiwabara, Ryozo Fujimoto, Photocatalytic TiO2 thin-films deposited by a pulsed laser deposition technique Applied Surface Science. ,vol. 169-170, pp. 535- 538 ,(2001) , 10.1016/S0169-4332(00)00715-7
Zhongchun Wang, Ulf Helmersson, Per-Olov Käll, Optical properties of anatase TiO2 thin films prepared by aqueous sol–gel process at low temperature Thin Solid Films. ,vol. 405, pp. 50- 54 ,(2002) , 10.1016/S0040-6090(01)01767-9