Web based tool control in a semiconductor fabrication facility

摘要: In brief, the present invention provides a system for interconnection of semiconductor fabrication tools (“process tools”) in facility by use data network and microprocessor based interface (“browser”) associated with each process tool. The provide communication accordance known standards via Intranet or Internet transfer links to one more remotely disposed browsers. Data is immediately available real time on all aspects operation facility. Equipment engineers can browse various from any location. Host communications be monitored without affect factory operation. compatible standard automation management software systems.