The rational design of a Au(I) precursor for focused electron beam induced deposition.

摘要: Au(I) complexes are studied as precursors for focused electron beam induced processing (FEBIP). FEBIP is an advanced direct-write technique nanometer-scale chemical synthesis. The stability and volatility of the characterized to design improved precursor pure Au deposition. Aurophilic interactions found play a key role. short lifetime ClAuCO in vacuum explained by strong, destabilizing Au-Au solid phase. While aurophilic do not affect ClAuPMe3\, they leave complex non-volatile. Comparison crystal structures ClAuPMe3 MeAuPMe3 shows that much weaker or partially even absent latter structure. This explains its high volatility. However, dissociates unfavorably during FEBIP, making it unsuitable precursor. study Me groups reduce interactions, compared Cl groups, which we attribute electronic rather than steric effects. Therefore propose MeAuCO potential It expected have weak volatile. stable enough act volatile source deposition, being stabilized 6.5 kcal/mol. Finally, likely dissociate single step Au.