Finite Element Method for Simulating Combined Effects of Temperature and Thermal Residual Stress on Surface Acoustic Waves
作者： Shigeo Kanna , Sangpil Yoon
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摘要: The embodiments of the present invention provide methods and systems for simulating a SAW and/or an LSAW device, while taking into account temperature residual stress device consideration. simulation involves transforming equation variational principle elasticity total potential energy with combined effects stress. transformation considers frequency-temperature relation effect initial deformation caused by is then transformed finite element considering periodic constraints or device. Afterwards, solved to obtain eigen values frequencies By simultaneously during transformation, solving becomes single step process, instead multi-step process.
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