作者: Thomas Lewin , Spartak Gevorgian , Dan Kuylenstierna
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摘要: The present invention relates to a tunable microwave arrangement (10) comprising microwave/ integrated circuit device (11) and substrate (6). It comprises layered structure disposed between said /integrated (5), acting as ground plane it at least one regularly or irregularly patterned first metal layer (1), second (3), ferroelectric film (2), whereby layers are so arranged that the layers) (2) is/are provided the/a (1) (3).