Closed-loop corrective beam shaping for laser processing of curved surfaces
作者： Daniel J Heath , Benita S Mackay , James A Grant-Jacob , Yunhui Xie , Richard O C Oreffo
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摘要: Laser processing is a widely used contactless machining technique, with ultrashort pulses affording the intensity to machine almost any material. However, micro-patterning over curved surfaces can be difficult, as fixed beam shape will necessarily skewed when directed at non-orthogonal sample surface. Here, we show that this aberration compensated via closed-loop adaptive shaping, use of MEMS device (Texas Instruments digital micromirror device) acting an spatial light modulator create profile transformation takes into account local surface gradient sample. The patterning 18 µm diameter circular structures region 3.00 mm titanium sphere has been demonstrated. Inclinations normal up π/2 from vertical were tested, and effective range was found π/5. MEMs also shown capable providing real-time precise laser repositioning compensates for errors in movement stages.
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