Progress on background-limited membrane-isolated TES bolometers for far-IR/submillimeter spectroscopy

摘要: To determine the lowest attainable phonon noise equivalent power (NEP) for membrane-isolation bolometers, we fabricated and measured thermal conductance of suspended Si 3 N 4 beams with different geometries via a thermometry technique. We beam cross-sectional areas ranging from 0.35 × 0.5 μ m 2 to 135 1.0 lengths 700 8300 m. The measurements directly imply that bolometers are capable reaching 4×10 -20 W/Hz 1/2 . This NEP is adequate Background-Limited Infrared-Submillimeter Spectrograph (BLISS) proposed Japanese SPICA observatory, NASA's SAFIR 10-meter, K telescope be deployed at L2. Further, heat capacity membrane show how this result implies one can make response time which fast enough BLISS.