Coupled effects of deposition and annealing temperatures on optical, electrical and mechanical properties of titanium oxide thin films

摘要: Abstract In this study the influence of deposition temperature and a post-deposition annealing process on optical, electrical, mechanical, tribological properties titanium oxide thin films was investigated. Based high-resolution XPS, it observed that became more metallic as raised from 15 to 450 °C. Moreover, mechanical film deposited at 450 °C were least 50% greater than for 15 °C. After 30 min in air, all transparent insulating. However, had mixed effects such 250 °C softened, but hardened. This trend is attributed different as-deposited stoichiometries. The results show coupled are quite complex TiO2 can be controlled independently their optical electrical properties. important because coatings often used outer-most layers devices.