Pre-heating temperature dependence of the c-axis orientation of ZnO thin films
作者： A.M.P. Santos , Edval J.P. Santos
DOI: 10.1016/J.TSF.2007.11.111
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摘要: Abstract Highly c -axis oriented zinc oxide, ZnO, thin film has been obtained at a very low pre-heating temperature, 120 °C. After depositing all layers, the is annealed 350 °C, for 5 h. The deposition process designed to be compatible with silicon/silicon-dioxide substrates, make piezoelectric coatings integrated smart sensors. films are synthesized by sol–gel method and deposited onto glass substrate. solution prepared dissolving zinc-acetate 2-hydrate in methanol. To optimize quality respect c-axis orientation, surface uniformity, selected parameters are: spin-coating speed number of coating layers. effect conditions studied applying experimental design response techniques on characteristic (002) peak, X-ray diffraction analysis. Surface uniformity grain size observed scanning electron microscopy.
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