Pressure sensor and a method for the manufacture thereof

作者: Jurgen W. Adelhelm , Jes V. Vogler

DOI:

关键词:

摘要: A pressure sensor unit having a chamber formed in housing by plate member diaphragm region. The is fastened to the via an adhesive which disposed joint between inner surface and intermediate support limits movement of direction transverse direction.

参考文章(7)
Christopher C. Hoinsky, Robert A. Schiesser, John A. Kovacich, Donald G. Williams, Hermetic mounting system for a pressure transducer ,(1991)
L Leidy, R Whitehead, Differential pressure responsive apparatus ,(1972)
Douglas W. Wilda, David B. Wamstad, Fluid pressure transmitter assembly ,(1983)
Heikki Kuisma, Capacitive pressure transducer ,(1988)
René Tanner, Stefan Vanyo, Alfred Dr. Phys. Wenger, Measurement cell, particularly for measurements of relative and differential pressure ,(1987)
Hiroaki Hachino, Kanji Kawakami, Seikou Suzuki, Motohisa Nishihara, Hideo Sato, Shigeyuki Kobori, Minoru Takahashi, Semiconductor pressure sensor having plural pressure sensitive diaphragms and method ,(1979)