Nano-fluidic flow in the nano-aperture ion source
作者： Leon van Kouwen
DOI: 10.1016/BS.AIEP.2019.09.002
关键词:
摘要: Abstract An essential aspect of the nano-aperture ion source is delivery gas towards double aperture structure. This requires a nano-fluidic channel. In order to estimate fluidic properties and understand underlying transport mechanisms such channel, flow model was developed. The shows good agreement with three different sets experimental data. used show that naive channel design will perform poorly. Nevertheless, carefully designed channels well are achievable.
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