SU-8 Optical Accelerometers
作者： Andreu Llobera , Volker Seidemann , Jos A. Plaza , Vctor Javier Cadarso , Stephanus Buttgenbach
DOI: 10.1109/JMEMS.2006.885845
关键词:
摘要: This paper presents the optimization and characterization of SU-8 quad beam optical accelerometers based on intensity modulation. An applied acceleration causes a misalignment between three waveguides, resulting in variation losses. Mechanical simulations have focused evaluation sensitivity design robust junction mechanical beams inertial mass. Results demonstrate that perfectly rounded structures show at least 4.4 times less stress than L-shaped counterparts. Optical simulation predicts optimal configuration terms is obtained when waveguides are not completely misaligned, since then losses insensitive to variations acceleration. Numerical sensitivities ranging 11.12 32.14 dB/g been obtained. Fabrication has simplified, now requiring only two photolithographic steps electroplating Cu as sacrificial layer. Experimental results reproducible experimental 13.1
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