In situ EC-STM studies of MPS, SPS, and chloride on Cu(100) : Structural studies of accelerators for dual damascene electrodeposition
作者： Sang-Eun Bae , Andrew A. Gewirth
DOI: 10.1021/LA061157T
关键词:
摘要: … about the mechanism of accelerators such as SPS and MPS. Whereas both SPS and MPS are modest inhibitors on their own, 12 both act as strong accelerators for Cu electrodeposition …
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