A new micromachined overlay CPW structure with low attenuation over wide impedance ranges and its application to low-pass filters
作者： Hong-Teuk Kim , Sanghwa Jung , Jae-Hyoung Park , Chang-Wook Baek , Yong-Kweon Kim
DOI: 10.1109/22.942577
关键词:
摘要: In this paper, a new micromachined overlay-coplanar-waveguide (OCPW) structure has been developed and its characteristics are studied in detail as function of the line parameters. OCPW, edges center conductors lifted by micromachining techniques partially overlapped with ground plane to facilitate low-impedance lines. The elevated help reduce conductor loss redistributing current over broad area. Comparative experiments on low-loss lossy substrates also confirm screening effect from substrate losses confining electric field air between plates. Compared coplanar-waveguide (CPW) lines, OCPW lines show wider impedance range (25-80 /spl Omega/) lower (<0.95 dB/cm at 50 GHz). advantages for low-Z/sub 0/ utilized realize high-performance stepped-impedance low-pass filter X-band. shows distinct conventional CPW terms size, loss, skirt, stopband characteristics.
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