Deposition of amorphous fluoropolymers thin films by laser ablation
作者： Graciela B. Blanchet
DOI: 10.1063/1.108939
关键词:
摘要: Thin films of the amorphous fluoropolymer, Teflon AF(r), were deposited by laser ablation using 4th harmonic, at 266 nm, a Nd‐YAG laser. Infrared spectroscopy indicated that composition ablated starting materials and x‐ray diffraction spectra corroborated lack crystallinity. The morphology was controlled temperature substrate during film formation. We suggest pyrolitic decomposition subsequent repolymerization as possible mechanism to formation Teflon‐AF(r) ablation.
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(15)
D.T. Morrison, T. Robertson, R.F. sputtering of plastics Thin Solid Films. ,vol. 15, pp. 87- 101 ,(1973) , 10.1016/0040-6090(73)90207-1
J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, J. Kaufman, Excimer laser etching of polyimide Journal of Applied Physics. ,vol. 58, pp. 2036- 2043 ,(1985) , 10.1063/1.336012
W de Wilde, G de Mey, Vacuum deposition rate measurements on thin polymer films Vacuum. ,vol. 24, pp. 307- 308 ,(1974) , 10.1016/0042-207X(74)90563-6
R. Harrop, P.J. Harrop, Friction of sputtered PTFE films Thin Solid Films. ,vol. 3, pp. 109- 117 ,(1969) , 10.1016/0040-6090(69)90083-2
I.H. Pratt, T.C. Lausman, Some characteristics of sputtered polytetrafluoroethylene films Thin Solid Films. ,vol. 10, pp. 151- 154 ,(1972) , 10.1016/0040-6090(72)90281-7
H. Biederman, S.M. Ojha, L. Holland, The properties of fluorocarbon films prepared by r.f. sputtering and plasma polymerization in inert and active gas Thin Solid Films. ,vol. 41, pp. 329- 339 ,(1977) , 10.1016/0040-6090(77)90319-4
L. Holland, H. Biederman, S.M. Ojha, Sputtered and plasma polymerized fluorocarbon films Thin Solid Films. ,vol. 35, ,(1976) , 10.1016/0040-6090(76)90267-4
PP Luff, M White, Thermal degradation of polyethylene and polytetrafluoroethylene during vacuum evaporation Vacuum. ,vol. 18, pp. 437- 440 ,(1968) , 10.1016/0042-207X(68)90336-9
R Srinivasan, Ablation of polymers and biological tissue by ultraviolet lasers Science. ,vol. 234, pp. 559- 565 ,(1986) , 10.1126/SCIENCE.3764428
S.I. Madorsky, V.E. Hart, S. Straus, V.A. Sedlak, Thermal Degradation of Tetrafluoroethylene and Hydrofluoroethylene Polymers in a Vacuum Journal of research of the National Bureau of Standards. ,vol. 51, pp. 327- 333 ,(1953) , 10.6028/JRES.051.036