Influence of the piezoelectric material on the signal and noise of magnetoelectric magnetic field sensors based on the delta-E effect

作者: Fabian Lofink , Simon Fichtner , Franz Faupel , Florian Niekiel , Benjamin Spetzler

DOI: 10.1063/5.0042448

关键词:

摘要: … We identify the influence of the dominating piezoelectric coefficients d … This factor decreases with increasing amplitude and … the piezoelectric coefficient by more than a factor of 2. 35. S. …

参考文章(62)
Miguel A Caro, Siyuan Zhang, Tommi Riekkinen, Markku Ylilammi, Michelle A Moram, Olga Lopez-Acevedo, Jyrki Molarius, Tomi Laurila, Piezoelectric coefficients and spontaneous polarization of ScAlN Journal of Physics: Condensed Matter. ,vol. 27, pp. 245901- ,(2015) , 10.1088/0953-8984/27/24/245901
A. Ludwig, E. Quandt, Optimization of the /spl Delta/E-effect in thin films and multilayers by magnetic field annealing ieee international magnetics conference. ,vol. 38, pp. 2829- 2831 ,(2002) , 10.1109/TMAG.2002.802467
P.T. Squire, S. Atalay, H. Chiriac, /spl Delta/E effect in amorphous glass covered wires ieee international magnetics conference. ,vol. 36, pp. 3433- 3435 ,(2000) , 10.1109/20.908850
Simon Fichtner, Tim Reimer, Steffen Chemnitz, Fabian Lofink, Bernhard Wagner, Stress controlled pulsed direct current co-sputtered Al1−xScxN as piezoelectric phase for micromechanical sensor applications APL Materials. ,vol. 3, pp. 116102- ,(2015) , 10.1063/1.4934756
G.A. Slack, Nonmetallic crystals with high thermal conductivity Journal of Physics and Chemistry of Solids. ,vol. 34, pp. 321- 335 ,(1973) , 10.1016/0022-3697(73)90092-9
V. Röbisch, E. Yarar, N. O. Urs, I. Teliban, R. Knöchel, J. McCord, E. Quandt, D. Meyners, Exchange biased magnetoelectric composites for magnetic field sensor application by frequency conversion Journal of Applied Physics. ,vol. 117, ,(2015) , 10.1063/1.4913814
A. T. Collins, E. C. Lightowlers, P. J. Dean, Lattice Vibration Spectra of Aluminum Nitride Physical Review. ,vol. 158, pp. 833- 838 ,(1967) , 10.1103/PHYSREV.158.833
Philip Jacob, A Khan, P Hess, None, Young's modulus of silicon nitride used in scanning force microscope cantilevers Journal of Applied Physics. ,vol. 95, pp. 1667- 1672 ,(2004) , 10.1063/1.1638886
M. Kersten, Über den Temperaturkoeffizienten des Elastizitätsmoduls ferromagnetischer Stoffe European Physical Journal. ,vol. 85, pp. 708- 716 ,(1933) , 10.1007/BF01330318