Acoustic lens for capacitive micromachined ultrasonic transducers
作者： Chienliu Chang , Kamyar Firouzi , Kwan Kyu Park , Ali Fatih Sarioglu , Amin Nikoozadeh
DOI: 10.1088/0960-1317/24/8/085007
关键词:
摘要: Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric in therapeutic ultrasound applications. In this paper we designed, fabricated and developed an acoustic lens formed on the CMUT mechanically focus ultrasound. The was designed based paraxial theory made of silicone rubber for impedance matching encapsulation. local oxidation silicon (LOCOS) fusion-bonding. verified behave like electromechanical resonator air exhibited wideband response a center frequency 2.2 MHz immersion. fabrication contained two consecutive mold castings directly surface CMUT. Applied ac burst input voltages at frequency, generated output pressure 1.89 MPa (peak-to-peak) focal point effective gain 3.43 Compared same without lens, demonstrated ability successfully provided viable solution miniaturization multi-modality forward-looking endoscopes electrical focusing.
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