Formation of chromium layers under Volmer–Weber conditions at critically small supersaturations
作者： V.I. Perekrestov , A.S. Kornyushchenko , V.V. Natalich
DOI: 10.1016/J.SOLIDSTATESCIENCES.2014.04.001
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摘要: Abstract The formation mechanism of chromium layers obtained with a help unbalanced magnetron sputterer operating under extremely weak vapor fluxes and high growth surface temperatures has been studied. results TEM SEM investigations have shown that the nucleation near-equilibrium Volmer–Weber conditions differs greatly from conventional notions about condensates at supersaturations. In this case, working gas pressure negative bias application to substrate influence structure mechanisms significantly. low dimensional systems in different forms, such as network structures, agglomerations weakly-bound crystals, columnar structures consisting prolonged crystals approximately identical habitus. It is supposed, oxygen which accumulates near deposition rates additionally affects mechanism.
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