Chapter Six Magnetic Microelectromechanical Systems: MagMEMS
作者： M.R.J. Gibbs , E.W. Hill , P. Wright
DOI: 10.1016/S1567-2719(07)17006-2
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摘要: Publisher Summary This chapter discusses the use of ferromagnetic materials; either transition metal or rare earth based. Magnetic sensors and actuators contain magnetic materials as an integral part their functionality, have components specially configured to measure quantities (field, flux density). The simplest form sensor is that a coil wire, with time varying density cutting generating voltage across according Faraday's law electromagnetic induction. introduction material in core can increase sensitivity (sensor application) provide actuation (more force movement available).
sci-hub.se 参考文章(168)
Rao R. Tummala, Fundamentals of Microsystems Packaging ,(2001)
S. M. Sze, Semiconductor Devices: Physics and Technology ,(1985)
M. Bowen, M. Bibes, A. Barthélémy, J.-P. Contour, A. Anane, Y. Lemaı̂tre, A. Fert, Nearly total spin polarization in La2/3Sr1/3MnO3 from tunneling experiments Applied Physics Letters. ,vol. 82, pp. 233- 235 ,(2003) , 10.1063/1.1534619
Etienne du, Trémolet de Lacheisserie, Magnetostriction : theory and applications of magnetoelasticity CRC Press. ,(1993)
Vijay K. Varadan, Julian W. Gardner, Microsensors, MEMS and Smart Devices ,(2001)
Terunobu Miyazaki, Nobuki Tezuka, Spin polarized tunneling in ferromagnet/insulator/ferromagnet junctions Journal of Magnetism and Magnetic Materials. ,vol. 151, pp. 403- 410 ,(1995) , 10.1016/0304-8853(95)00563-3
C. L. Platt, B. Dieny, A. E. Berkowitz, Spin‐dependent tunneling in HfO2 tunnel junctions Applied Physics Letters. ,vol. 69, pp. 2291- 2293 ,(1996) , 10.1063/1.117537
P. M. Tedrow, R. Meservey, SPIN POLARIZATION OF ELECTRONS TUNNELING FROM FILMS OF Fe, Co, Ni, AND Gd. Physical Review B. ,vol. 7, pp. 318- 326 ,(1973) , 10.1103/PHYSREVB.7.318
G. Hoffman, E. Hill, J. Birtwistle, Compensating temperature-induced sensitivity changes in thin film NiFeCo magnetoresistive magnetometers IEEE Transactions on Magnetics. ,vol. 22, pp. 949- 951 ,(1986) , 10.1109/TMAG.1986.1064390
M. N. Baibich, J. M. Broto, A. Fert, F. Nguyen Van Dau, F. Petroff, P. Etienne, G. Creuzet, A. Friederich, J. Chazelas, Giant magnetoresistance of (001)Fe/(001)Cr magnetic superlattices. Physical Review Letters. ,vol. 61, pp. 2472- 2475 ,(1988) , 10.1103/PHYSREVLETT.61.2472