Evaporation of films of chemical elements with a neodymium glass laser
作者： V M Boyakov , V M Epikhin , B A Kalin , M K Makhatov , I N Nikolaev
DOI: 10.1070/QE1978V008N07ABEH010475
关键词:
摘要: Thin films were evaporated using a quasi-cw neodymium glass laser. (~10 nm) uniform-thickness of many elements deposited laser radiation intensities q >1 MW/cm2. These mainly polycrystalline.
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