作者: Koichi Takaki , Yuki Hatanaka , Kaname Arima , Seiji Mukaigawa , Tamiya Fujiwara
DOI: 10.1016/J.VACUUM.2008.03.047
关键词:
摘要: … multipoint were employed as ground electrode. The alumina … investigated using three different electrode configurations: … The multipoint electrode has 5 mm height 528 pyramid shape …