Effect of Tool-electrode Shape on Uniformity of Electrochemical Deposition and Dissolution on Resistive Workpieces☆

作者: V.M. Volgin , V.V. Lyubimov , V.V. Kukhar , A.D. Davydov

DOI: 10.1016/J.PROCIR.2016.08.030

关键词:

摘要: Abstract This work is devoted to the theoretical study of effect tool-electrode shape and operating conditions on thickness uniformity deposited dissolved metal layer resistive workpieces. The Laplace's equation for potential in electrolyte solution, Poisson's workpiece, evolution were used as mathematical model. numerical solution was performed using boundary element finite methods. results computer modeling demonstrate electrochemical deposition dissolution.

参考文章(19)
Vladimir M Volgin, Victor V Lyubimov, Alexey D Davydov, None, Modeling and numerical simulation of electrochemical micromachining Chemical Engineering Science. ,vol. 140, pp. 252- 260 ,(2016) , 10.1016/J.CES.2015.09.034
V.M. Volgin, V.V. Lyubimov, V.D. Kukhar, A.D. Davydov, Modeling of Wire Electrochemical Micromachining Procedia CIRP. ,vol. 37, pp. 176- 181 ,(2015) , 10.1016/J.PROCIR.2015.08.098
M. Matlosz, P. ‐H. Vallotton, A. C. West, D. Landolt, Nonuniform Current Distribution and Thickness during Electrodeposition onto Resistive Substrates Journal of The Electrochemical Society. ,vol. 139, pp. 752- 761 ,(1992) , 10.1149/1.2069297
Mordechai Ben‐Porat, Joseph Yahalom, Eliezer Rubin, Current Distribution during Electroplating Within a Tubular Electrode of High Ohmic Resistance Journal of The Electrochemical Society. ,vol. 130, pp. 559- 567 ,(1983) , 10.1149/1.2119751
Liu Yang, Tanya Atanasova, Aleksandar Radisic, Johan Deconinck, Alan C. West, Philippe Vereecken, Wafer-scale Cu plating uniformity on thin Cu seed layers Electrochimica Acta. ,vol. 104, pp. 242- 248 ,(2013) , 10.1016/J.ELECTACTA.2013.04.094
S. Hinduja, M. Kunieda, Modelling of ECM and EDM processes Cirp Annals-manufacturing Technology. ,vol. 62, pp. 775- 797 ,(2013) , 10.1016/J.CIRP.2013.05.011
Johnsee Lee, J. R. Selman, Effects of Separator and Terminal on the Current Distribution in Parallel‐Plate Electrochemical Flow Reactors Journal of The Electrochemical Society. ,vol. 129, pp. 1670- 1678 ,(1982) , 10.1149/1.2124247