Plasma-Based Chemical Modification of Epitaxial Graphene
作者： Scott G Walton , Sandra C Hernández , Mira Baraket , Virginia D Wheeler , Luke O Nyakiti
DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.717-720.657
关键词:
摘要: In this work, the treatment of epitaxial graphene on SiC using electron beam generated plasmas produced in mixtures argon and oxygen is demonstrated. The imparts functional groups surface with concentrations ranging up to about 12 at.%, depending parameters. Surface characterization functionalized shows incorporation lattice by disruption ∏-bonds, an altering bulk electrical properties.
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