Generation efficiency of chemically-active particles in a self-sustained glow discharge

摘要: A model describing kinetic processes in plasmas for dry air and O{sub 2}:N{sub 2}:H{sub 2}O:CO{sub 2} mixtures was formulated. The based on solving the Boltzmann equation electron energy distribution function. G-factors were calculated generation of various particles. electric discharge efficiency chemically-active particle analyzed. Its dependence reduced field gas mixture composition theoretically investigated. application decontamination considered. selfsustained glow demonstrated to be a promising generator atoms radicals purpose cleaning air. 37 refs., 8 figs., 2 tabs.