Analysis on Structure and Properties of Diamondlike Carbon Films from Ion Beam Deposition
作者： Zhuping Chen , Ayo Olofinjana , John Bell , None
DOI: 10.1080/10426910008913016
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摘要: Abstract Diamondlike carbon (DLC) films from a primary ion beam deposition system, were examined using nanoindentation, SEM, AES, XPS, and Raman Spectroscopy. The have hardness values ranging 21 to 29 GPa. results of SEM AES show that the are predominantly without any crystalline features, nitrogen is incorporated as used source. Spectroscopy confirm amorphous with combination sp3 sp2 bonding. It concluded DLC can be directly deposited on steel single sputter solid target, structure properties largely depend
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