Method and apparatus for optical measurement of a surface profile of a specimen

摘要: The object of the invention is a method and an apparatus for optical measurement surface profile specimen, series n images specimen being acquired with image acquisition in different planes z direction coordinate system (x, y, z). contents all resulting stack are compared to each other at point y) order determine plane therefrom according predetermined criteria, assign its number (N) that y), store it mask image. contains 3D data surface. Processing can be performed using 2D processing procedures. information quickly easily retrieved from reconstructed displayed three-dimensionally.