作者: C. H. Kruger , T. G. Owano , C. O. Laux , R. N. Zare
DOI: 10.1051/JP4:1997406
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摘要: Atmospheric pressure plasmas are frequently considered to be in local thermodynamic equilibrium due the high frequency of collisional processes which drive plasma state towards a Maxwell-Boltzmann equilibrium. However, various forms thermodynamic, ionizational, and chemical nonequilibrium have been demonstrated investigated atmospheric environments over last several years, behavior such systems can quite significant. The investigation, understanding, exploitation chemistry is necessary further expansion plasma-based into mainstream manufacturing processing applications. Several experimental programs investigate fundamental chemistry, application this undertaken our laboratories. results these investigations shed light on kinetics behind provided insights beneficial control for