Nonequilibrium in Thermal Plasmas with Applications to Diamond Synthesis

作者: C. H. Kruger , T. G. Owano , C. O. Laux , R. N. Zare

DOI: 10.1051/JP4:1997406

关键词:

摘要: Atmospheric pressure plasmas are frequently considered to be in local thermodynamic equilibrium due the high frequency of collisional processes which drive plasma state towards a Maxwell-Boltzmann equilibrium. However, various forms thermodynamic, ionizational, and chemical nonequilibrium have been demonstrated investigated atmospheric environments over last several years, behavior such systems can quite significant. The investigation, understanding, exploitation chemistry is necessary further expansion plasma-based into mainstream manufacturing processing applications. Several experimental programs investigate fundamental chemistry, application this undertaken our laboratories. results these investigations shed light on kinetics behind provided insights beneficial control for

参考文章(13)
M. G. Dunn, S. Kang, Theoretical and Experimental Studies of Reentry Plasmas NASA CR-2232. ,(1973)
Roop N. Gupta, Kam-Pui Lee, Jerrold M. Yos, Richard A. Thompson, A review of reaction rates and thermodynamic and transport properties for the 11-species air model for chemical and thermal nonequilibrium calculations to 30000 K NASA STI/Recon Technical Report N. ,vol. 89, pp. 21193- ,(1989)
CHRISTOPHE LAUX, RICHARD GESSMAN, CHARLES KRUGER, Modeling the UV and VUV radiative emission of high-temperature air AIAA, 28th Thermophysics Conference. ,(1993) , 10.2514/6.1993-2802
Richard Gessman, Christophe Laux, Charles Kruger, Richard Gessman, Christophe Laux, Charles Kruger, EXPERIMENTAL STUDY OF KINETIC MECHANISMS OF RECOMBINING ATMOSPHERIC PRESSURE AIR PLASMAS 28th Plasmadynamics and Lasers Conference. ,(1997) , 10.2514/6.1997-2364
C. Park, Nonequilibrium Air Radiation (NEQAIR) Program User's Manual, NASA TM 86707. ,(1985)
Michael Loh, John Liebeskind, Mark Cappelli, Arcjet thrusters for the synthesis of diamond and cubic-boron nitride films 30th Joint Propulsion Conference and Exhibit. ,(1994) , 10.2514/6.1994-3233
Christophe Laux, Richard Gessman, Charles Kruger, Mechanisms of ionizational nonequilibrium in air and nitrogen plasmas 26th Plasmadynamics and Lasers Conference. ,(1995) , 10.2514/6.1995-1989
Graham Candler, Christophe Laux, Charles Kruger, Richard Gessman, Graham Candler, Christophe Laux, Charles Kruger, Richard Gessman, Numerical simulation of a nonequilibrium nitrogen plasma experiment 28th Plasmadynamics and Lasers Conference, 1997. ,(1997) , 10.2514/6.1997-2365
Thomas Owano, Edward Wahl, Charles Kruger, Richard Zare, Degenerate four-wave mixing as a spectroscopic probe of boundary layer chemistry in thermal plasma CVD 26th Plasmadynamics and Lasers Conference. ,(1995) , 10.2514/6.1995-1954