Influence of modulation ratio on structure and properties of nanoscale ZrB2/ZrAlN multilayered coatings
作者： DeJun Li , YuanBin Kang , Lei Dong , XiangYun Deng , Hao Liu
DOI: 10.1007/S11431-009-0241-Y
关键词:
摘要: ZrB2/ZrAlN multilayered coatings with various modulation ratios (\( t_{ZrB_2 } :t_{ZrAlN} \)) and constant periods were prepared by magnetron sputtering system at room temperature. SEM, XRD, surface profiler nano-indenter employed to investigate the influences of \( \) on microstructure mechanical properties coatings. Sharp interfaces nanoscale confirmed SEM. The multilayer period 40 nm ratio 3:1 displayed highest hardness (36.4 GPa) critical fracture load (76.477 mN) lower stress. polycrystalline structure modulate directly responsible for enhanced properties.
springer.com
harvard.edu
sci-hub.se 参考文章(18)
DeJun Li, JingJing Zhang, MingXia Wang, Synthesis of nanoscale multilayered ZrN/W coatings by ion beam assisted deposition Science in China Series E: Technological Sciences. ,vol. 50, pp. 206- 212 ,(2007) , 10.1007/S11431-007-0023-3
M. Nordin, S. Jacobson, A New Tool for Evaluation of Intrinsic Mechanical Properties of Multilayered Coatings Surface Engineering. ,vol. 17, pp. 465- 471 ,(2001) , 10.1179/026708401322911374
D. J. Li, M. Cao, X. Y. Deng, X. Sun, W. H. Chang, W. M. Lau, Multilayered coatings with alternate ZrN and TiAlN superlattices Applied Physics Letters. ,vol. 91, pp. 251908- ,(2007) , 10.1063/1.2826284
A. Ben Cheikh Larbi, B. Tlili, Fretting wear of multilayered PVD TiAlCN/TiAlN/TiAl on AISI 4140 steel Surface and Coatings Technology. ,vol. 201, pp. 1511- 1518 ,(2006) , 10.1016/J.SURFCOAT.2006.02.025
M. Panjan, S. Šturm, P. Panjan, M. Čekada, The influence of rotation during sputtering on the stoichiometry of TiAlN/CrNx multilayer coating Surface & Coatings Technology. ,vol. 203, pp. 554- 557 ,(2008) , 10.1016/J.SURFCOAT.2008.04.082
Li Chen, S.Q. Wang, Yong Du, Jia Li, Microstructure and mechanical properties of gradient Ti(C, N) and TiN/Ti(C, N) multilayer PVD coatings Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 478, pp. 336- 339 ,(2008) , 10.1016/J.MSEA.2007.06.017
Peter Panjan, Miha Čekada, Boris Navinšek, A new experimental method for studying the cracking behaviour of PVD multilayer coatings Surface & Coatings Technology. ,vol. 174, pp. 55- 62 ,(2003) , 10.1016/S0257-8972(03)00618-2
D.B. Lewis, D. Reitz, C. Wüstefeld, R. Ohser-Wiedemann, H. Oettel, A.P. Ehiasarian, P.Eh. Hovsepian, Chromium nitride/niobium nitride nano-scale multilayer coatings deposited at low temperature by the combined cathodic arc/unbalanced magnetron technique Thin Solid Films. ,vol. 503, pp. 133- 142 ,(2006) , 10.1016/J.TSF.2005.08.369
A. Madan, S. A. Barnett, A. Misra, H. Kung, M. Nastasi, Structure, stability, and mechanical properties of epitaxial W/NbN superlattices Journal of Vacuum Science and Technology. ,vol. 19, pp. 952- 957 ,(2001) , 10.1116/1.1365133
J. Perez-Mariano, K.-H. Lau, A. Sanjurjo, J. Caro, J.M. Prado, C. Colominas, Multilayer coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD): TiN/TaN and TiN/W Surface and Coatings Technology. ,vol. 201, pp. 2174- 2180 ,(2006) , 10.1016/J.SURFCOAT.2006.03.021