Atomic layer growth of SiO2 on Si(100) using SiCl4 and H2O in a binary reaction sequence
作者： O. Sneh , M.L. Wise , A.W. Ott , L.A. Okada , S.M. George
DOI: 10.1016/0039-6028(95)00471-8
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摘要: … Following the high pressure SiC14 reactions, the SiC] 4 was condensed in a liquid nitrogen trap. At the end of an experimental day, the trap was sealed and slowly purged with N 2. The …
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