(Cr1-x,Alx)N ein Review über ein vielseitig einsetzbares Schichtsystem†

作者: K. Bobzin , E. Lugscheider , R. Nickel , P. Immich

DOI: 10.1002/MAWE.200600048

关键词:

摘要: Im Bereich der PVD-Beschichtungen haben die nitridischen Schichtsysteme einen sehr grosen Marktanteil eingenommen. Ein besonderes Potenzial im Hochtemperaturwerkzeugbeschichtungen fur Ur- und Umformverfahren, aber auch den Einsatz Niedertemperaturbereich sich chrombasierte Schichten bewahrt. Bereits Anfang 90er Jahre wurden erste Untersuchungen ternaren System Chrom-Aluminium-Stickstoff durchgefuhrt. Dieses Schichtsystem zeigte hervorragende chemische Bestandigkeit gegen eine Vielzahl von Medien, gute abrasive Bestandigkeit. Interessant ist, dass durch Variation des Verhaltnisses CrN-AlN Einfuhrung Nanolayern Eigenschaften in weiten Grenzen variiert werden konnen. Fur Bauteilbeschichtungen ist es gelungen Prozesstemperaturen gepulste Leistungsversorgungen unter 200 °C zu senken. Damit dieses schnell wachsenden interessant. (Cr1-x,Alx)N a review about multi-purpose coating system Nitride based coatings claimed big market share for PVD-coatings. Especially the field high temperature casting and cutting operations chromium are well used. These also used low processes of machine parts. In beginning nineties first examinations done on ternary system Chromium-Aluminium-Nitride. This shows an excellent corrosion behaviour against many different liquids, but gains hardness good wear behaviour. By changing AlN to CrN content design CrAlN opens up wide range applications. A major step parts was reducing process beneath 200 °C. only possible by using pulsed power supplies. very performance fast growing coated e.g. spindle bearings.

参考文章(18)
Masahiro Kawate, Ayako Kimura, Tetsuya Suzuki, Microhardness and lattice parameter of Cr1−xAlxN films Journal of Vacuum Science and Technology. ,vol. 20, pp. 569- 571 ,(2002) , 10.1116/1.1448510
E Lugscheider, C Barimani, S Guerreiro, K Bobzin, Corrosion tests of PVD coatings with die lubricant used for Al high-pressure die-casting dies Surface & Coatings Technology. ,vol. 108, pp. 408- 412 ,(1998) , 10.1016/S0257-8972(98)00624-0
H. Holleck, Metastable coatings — Prediction of composition and structure Surface and Coatings Technology. ,vol. 36, pp. 151- 159 ,(1988) , 10.1016/0257-8972(88)90145-4
E. Lugscheider, K. Bobzin, C. Piñero, F. Klocke, T. Massmann, Development of a superlattice (Ti, Hf, Cr)N coating for cold metal forming applications Surface & Coatings Technology. ,vol. 177, pp. 616- 622 ,(2004) , 10.1016/S0257-8972(03)00935-6
O Banakh, P.E Schmid, R Sanjinés, F Lévy, High-temperature oxidation resistance of Cr1−xAlxN thin films deposited by reactive magnetron sputtering Surface & Coatings Technology. ,vol. 163, pp. 57- 61 ,(2003) , 10.1016/S0257-8972(02)00589-3
A. Sugishima, H. Kajioka, Y. Makino, Phase transition of pseudobinary Cr–Al–N films deposited by magnetron sputtering method Surface & Coatings Technology. ,vol. 97, pp. 590- 594 ,(1997) , 10.1016/S0257-8972(97)00402-7
R Sanjinés, O Banakh, C Rojas, P.E Schmid, F Lévy, Electronic properties of Cr1−xAlxN thin films deposited by reactive magnetron sputtering Thin Solid Films. ,vol. 420, pp. 312- 317 ,(2002) , 10.1016/S0040-6090(02)00830-1
Ayako Kimura, Masahiro Kawate, Hiroyuki Hasegawa, Tetsuya Suzuki, Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films Surface and Coatings Technology. ,vol. 169-170, pp. 367- 370 ,(2003) , 10.1016/S0257-8972(03)00040-9
M. Uchida, N. Nihira, A. Mitsuo, K. Toyoda, K. Kubota, T. Aizawa, Friction and wear properties of CrAlN and CrVN films deposited by cathodic arc ion plating method Surface & Coatings Technology. ,vol. 177, pp. 627- 630 ,(2004) , 10.1016/S0257-8972(03)00937-X