Dewetting and nanopattern formation of thin Pt films on SiO2 induced by ion beam irradiation
作者： Xiaoyuan Hu , David G. Cahill , Robert S. Averback
DOI: 10.1063/1.1372623
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摘要: Dewetting and nanopattern formation of 3–10 nm Pt thin films upon ion irradiation is studied using scanning electron microscopy (SEM). Lateral feature size the fraction exposed surface area are extracted from SEM images analyzed as functions dose. The dewetting phenomenon has little temperature dependence for 3 irradiated by 800 keV Kr+ at temperatures ranging 80 to 823 K. At 893 K, dewet without irradiation, no pattern observed even after irradiation. thickness films, in range nm, influences formation, with lateral increasing approximately linearly film thickness. effect different species energies on process also investigated Ar+ 19.5 keV He+, Ar+, Kr+, Xe+ scale energy deposition density (J/cm2) all conditions except 19.5 keV Xe+
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