Magnetic field argon ion filtering for pulsed magnetron sputtering growth of two-dimensional MoS2
作者： Andrey A. Voevodin , Adam R. Waite , John E. Bultman , Jianjun Hu , Christopher Muratore
DOI: 10.1016/J.SURFCOAT.2015.09.013
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摘要: … Modification of pulsed magnetron sputter deposition by adding a tunable auxiliary magnetic field can provide a new route for a large area 2D TMD material synthesis, which is …
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