Poly(arylene ether) homopolymer compositions and methods of manufacture thereof
作者： Tian-An Chen , Emma Brouk , Kreisler S. Y. Lau , Boris A. Kprolev
DOI:
关键词:
摘要: Dielectric compositions encompassing one or more poly(arylene ether) polymers are provided. The dielectric have the repetitive structural unit formula (I) where n=l to 200, Y and Ar each a divalent arylene radical, derived from bisphenol compounds of general HO-Y-OH, difluoro diarylacetylenes and/or ethynylated benzophenones F-Ar-F Z is optionally hydrogen, methyl group monofluoro-benzophenone derivative Z-F. Such employed with variety microelectronic devices, for example, integrated circuits multichip modules.
lens.org 参考文章(27)
Paul M. Hergenrother, Robert G. Bryant, Brian J. Jensen, Phenylethynyl reactive diluents ,(1994)
Martino Paventi, Allan S. Hay, Diarylacetylenes, enamines and acetylenic polymers and their production ,(1992)
Shun-Ichi Fukuyama, Takahisa Namiki, Keiji Watanabe, Akira Oikawa, Masaaki Yamagami, Polysilphenylenesiloxane, production process thereof, and resist material and semiconductor device formed thereof ,(1990)
Leonard J. Buckley, James R. Griffith, Arthur W. Snow, Mark Ray, Inter-level dielectrics with low dielectric constants ,(1995)
Paul E. Schilling, Boris A. Korolev, Tian-An Chen, Emma Brouk, Heike W. Thompson, Kreisler S. Y. Lau, Poly(arylene ether) compositions and methods of manufacture thereof ,(1998)
Brian J. Jensen, Robert G. Bryant, Paul M. Hergenrother, Phenylethynyl-terminated poly(arylene ethers) ,(1993)
Dieter Prof. Dr. Arlt, Axel Dr. Bader, Process for the preparation of symmetrical diarylacetylenes ,(1990)
Brian J. Jensen, Paul M. Hergenrother, Poly(arylene ether)s containing pendent ethynyl groups ,(1994)
Sergio Massirio, Brunella Fornasari, Angelo Vallarino, Marcello Gagliano, Mauro Besio, Piera Di Mito, Process for preparing bisphenol fluorene compounds ,(1991)
Rempei Nakata, Haruo Okano, Nobuo Hayasaka, Takahito Nagamatsu, Hitoshi Ito, Akemi Satoh, Masao Toyosaki, Yukio Nishiyama, Riichirou Aoki, Method of manufacturing silicon oxide film containing fluorine ,(1993)