作者: Kyounga Lim , Juyun Park , Do-Geun Kim , Jong-Kuk Kim , Jae-Wook Kang
DOI: 10.1016/J.APSUSC.2012.05.159
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摘要: Abstract Copper oxide (CuOx) thin films were deposited on flexible polyethyleneterephthalate (PET) substrates by rf magnetron sputtering and the effects of power O2 fraction physical chemical properties examined. The obtained characterized with a surface profiler, X-ray diffraction (XRD), scanning electron microscopy (SEM), four points probe, photoelectron spectroscopy (XPS). trend resistance CuOx was almost identical as varied from 200 to 300 W. increased up 14.3%. After this point it decreased. propensity films, however, monotonically function at 400 W power. XRD study revealed that preferential phase changed metallic cubic Cu(1 1 1) through Cu2O(1 1 1) monoclinic CuO( 1 ¯ ) increased. compositional ratio Cu species different oxidation state in investigated induced Auger (XAES). XAES dependent higher applied, more Cu+ less Cu2+ formed films.