Structural, electrical and mechanical properties of magnetron sputtered NiTi/PZT/TiOx thin film heterostructures
作者： Nitin Choudhary , D.K. Kharat , Davinder Kaur
DOI: 10.1016/J.SURFCOAT.2010.11.056
关键词:
摘要: Abstract Shape memory alloy (NiTi) thin films coupled to ferroelectric lead zirconate titanate (PZT) produce an intelligent material capable of performing both sensing and actuating functions. In the present study, we report on in-situ growth NiTi/PZT/TiOx heterostructure Pt/Ti/SiO2/Si substrates using magnetron sputtering technique. Deposition processing, microstructure, surface morphology, electrical properties mechanical these heterostructures were systematically investigated. The top NiTi exhibit austenitic B2 structure with preferred (110) orientation. varying thickness had a significant influence heterostructure. bottom TiOx layer was observed favor perovskite PZT (100) Nanoindentation tests performed at room temperature. hardness lower found be highly influenced by underneath layer. exhibited interesting martensite austenite phase transformation polarization-electric field hysteresis behavior remanent polarization (Pr) coercive (Er) 17.1 μC/cm2 69.6 kV/cm, respectively. These having SMA are immense technological importance for MEMS devices.
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