Virtual sensor based monitoring and fault detection/classification system and method for semiconductor processing equipment

摘要: A virtual sensor based monitoring and fault detection/classification system (10) for semiconductor processing equipment (12) is provided. plurality of sensors (14) are each operable to measure a process condition provide signal representing the measured condition. filtering units (16) receive at least one from reduce data represented by filtered data. (24) The model states work piece in (12). Each an output estimated value modeled state. rule logic (26) signals provided monitor or detect classify faults within