Preparation of PbTiO 3 Ferroelectric Thin Film by Chemical Vapor Deposition
作者： Taichi Nakagawa , Jiro Yamaguchi , Masanori Okuyama , Yoshihiro Hamakawa
DOI: 10.1143/JJAP.21.L655
关键词:
摘要: … Chemical vapor deposition of PbTiO 3 thin film on the substrate of Pt plate has been successfully made. (100)- and (001)-oriented PbTiO 3 film has been obtained under a certain …
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ipap.jp参考文章(2)
Masanori Okuyama, Yasushi Matsui, Hiroyuki Nakano, Taichi Nakagawa, Yoshihiro Hamakawa, Preparation of PbTiO3 Ferroelectric Thin Film by RF Sputtering Japanese Journal of Applied Physics. ,vol. 18, pp. 1633- 1634 ,(1979) , 10.1143/JJAP.18.1633
Katsuhiko Tanaka, Yasuyuki Higuma, Kiyoyuki Yokoyama, Taichi Nakagawa, Yoshihiro Hamakawa, Ferroelectric PLZT Thin Films Fabricated by RF Sputtering Japanese Journal of Applied Physics. ,vol. 15, pp. 1381- 1382 ,(1976) , 10.1143/JJAP.15.1381