作者: Yali Liu , Zhanfeng Yu , Shuxue Zhou , Limin Wu
DOI: 10.1016/J.APSUSC.2005.05.072
关键词:
摘要: … Surfaces of the disks and electrodes (except for PVD wafers) were abraded with emery papers of 600–1200 grit, rinsed with bi-distilled water, and then sonicated degreasing in acetone …