A micromachined gold–palladium Kelvin probe for hydrogen sensing

作者: A. D’Amico , C. Di Natale , E. Martinelli , A. Tibuzzi , B. Margesin

DOI: 10.1016/J.SNB.2009.03.076

关键词:

摘要: Abstract In this paper we discuss the fundamental principles of Kelvin probe apparatus; in particular, first, find an analytical relation for sensitivity vibrating capacitors, so that advantages integration can be quantitatively estimated; second, describe equivalent electric circuit thus allowing to simulate a complete with standard electronic simulator; third, illustrate most important issues interface. A part research and technological work reported by deals fabrication process micromachined gold–palladium capacitors fully integrated on silicon, hydrogen sensing applications. The relevant steps are explained. Preliminary experimental results first capacitor prototypes testing as static C–V (capacitance–voltage) curves measurement air work–function difference.

参考文章(13)
M HOERTER, A OPREA, N BARSAN, U WEIMAR, Kelvin Probe measurements of polymer coated gold substrates: Mechanism studies Sensors and Actuators B-chemical. ,vol. 134, pp. 266- 272 ,(2008) , 10.1016/J.SNB.2008.04.048
Corrado Di Natale, Roberto Paolesse, Alessandro Mantini, Antonella Macagnano, Tristano Boschi, Arnaldo D’Amico, None, Kelvin prove investigation of self-assembled-monolayers of thiol derivatized porphyrins interacting with volatile compounds Sensors and Actuators B-chemical. ,vol. 48, pp. 368- 372 ,(1998) , 10.1016/S0925-4005(98)00072-0
N A Surplice, R J D'Arcy, A critique of the Kelvin method of measuring work functions Journal of Physics E: Scientific Instruments. ,vol. 3, pp. 477- 482 ,(1970) , 10.1088/0022-3735/3/7/201
W. A. Zisman, A NEW METHOD OF MEASURING CONTACT POTENTIAL DIFFERENCES IN METALS Review of Scientific Instruments. ,vol. 3, pp. 367- 370 ,(1932) , 10.1063/1.1748947
K. I. Lundström, M. S. Shivaraman, C. M. Svensson, A hydrogen-sensitive Pd-gate MOS transistor Journal of Applied Physics. ,vol. 46, pp. 3876- 3881 ,(1975) , 10.1063/1.322185
K.D. Schierbaum, U. Weimar, W. Göpel, R. Kowalkowski, Conductance, work function and catalytic activity of SnO2-based gas sensors Sensors and Actuators B: Chemical. ,vol. 3, pp. 205- 214 ,(1991) , 10.1016/0925-4005(91)80007-7
S. Bastide, D. Gal, David Cahen, L. Kronik, Surface photovoltage measurements in liquids Review of Scientific Instruments. ,vol. 70, pp. 4032- 4036 ,(1999) , 10.1063/1.1150030
P.L. Bergstrom, S.V. Patel, J.W. Schwank, K.D. Wise, A micromachined surface work-function gas sensor for low-pressure oxygen detection Sensors and Actuators B-chemical. ,vol. 42, pp. 195- 204 ,(1997) , 10.1016/S0925-4005(97)80336-X
I. R. Peterson, Kelvin probe liquid-surface potential sensor Review of Scientific Instruments. ,vol. 70, pp. 3418- 3424 ,(1999) , 10.1063/1.1149929
H. Lorenz, M. Peschke, H. Riess, J. Janata, I. Eisele, New suspended gate FET technology for physical deposition of chemically sensitive layers Sensors and Actuators A: Physical. ,vol. 23, pp. 1023- 1026 ,(1990) , 10.1016/0924-4247(90)87082-T