作者: A. D’Amico , C. Di Natale , E. Martinelli , A. Tibuzzi , B. Margesin
DOI: 10.1016/J.SNB.2009.03.076
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摘要: Abstract In this paper we discuss the fundamental principles of Kelvin probe apparatus; in particular, first, find an analytical relation for sensitivity vibrating capacitors, so that advantages integration can be quantitatively estimated; second, describe equivalent electric circuit thus allowing to simulate a complete with standard electronic simulator; third, illustrate most important issues interface. A part research and technological work reported by deals fabrication process micromachined gold–palladium capacitors fully integrated on silicon, hydrogen sensing applications. The relevant steps are explained. Preliminary experimental results first capacitor prototypes testing as static C–V (capacitance–voltage) curves measurement air work–function difference.