Bulk disc resonators radial and wineglass mode resonance characterization for mass sensing applications
作者： Mohammad Hossein Zarifi , Mojgan Daneshmand
DOI: 10.1007/S00542-015-2549-9
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摘要: This paper reports the design and fabrication of bulk mode micromechanical disc resonators operating in radial wine-glass modes excitation. The reported structures are fabricated utilizing a single crystal SOI wafer through micromachining processes. Both on device layer with thickness 20 µm gap size 1.75 between resonant beam surrounding electrodes. Four anchors support using T-shaped connection stem. designed resonate at 2.87 3.99 MHz, wine glass respectively, electrostatically actuated by DC voltage 110 V show high quality factors while air, 1,1876.2 for 7380 radial. In addition, used distributed point mass measurements sputtered gold metal layer. resonator shows frequency down shift 1 kHz 44 ngr mass, 22 83 µgr. Same test is performed resonance 1.24 25.54 was observed respectively air room temperature.
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A Cagliani, Z J Davis, Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing Journal of Micromechanics and Microengineering. ,vol. 21, pp. 045016- ,(2011) , 10.1088/0960-1317/21/4/045016
Fenfei Liu, Mani Hossein-Zadeh, Mass Sensing With Optomechanical Oscillation IEEE Sensors Journal. ,vol. 13, pp. 146- 147 ,(2013) , 10.1109/JSEN.2012.2217956
J.E.-Y. Lee, A.A. Seshia, 5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million Sensors and Actuators A-physical. ,vol. 156, pp. 28- 35 ,(2009) , 10.1016/J.SNA.2009.02.007
Guoqiang Wu, Dehui Xu, Bin Xiong, Yuelin Wang, A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 18, pp. 25- 30 ,(2012) , 10.1007/S00542-011-1372-1
Nazli Zargarpour, Mohammad Hossein Zarifi, A piezoelectric micro-electromechanical microphone for implantable hearing aid applications Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 21, pp. 893- 902 ,(2015) , 10.1007/S00542-014-2134-7
Sang-Jin Kim, Takahito Ono, Masayoshi Esashi, Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique Review of Scientific Instruments. ,vol. 78, pp. 085103- ,(2007) , 10.1063/1.2766840
Guoqiang Wu, Dehui Xu, Bin Xiong, Yuelin Wang, A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer Journal of Micromechanics and Microengineering. ,vol. 22, pp. 025020- ,(2012) , 10.1088/0960-1317/22/2/025020
Mohammad Hossein Zarifi, Mojgan Daneshmand, Design and fabrication of a square shape bulk mode MEMS resonators Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 21, pp. 2455- 2462 ,(2015) , 10.1007/S00542-014-2347-9
Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Zeying Ren, C.T.-C. Nguyen, Series-resonant VHF micromechanical resonator reference oscillators IEEE Journal of Solid-state Circuits. ,vol. 39, pp. 2477- 2491 ,(2004) , 10.1109/JSSC.2004.837086
Yongha Hwang, Feng Gao, Augustin J. Hong, Rob N. Candler, Porous Silicon Resonators for Improved Vapor Detection IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 21, pp. 235- 242 ,(2012) , 10.1109/JMEMS.2011.2170819