Investigation of various phases of Fe–Si structures formed in Si by low energy Fe ion implantation
作者： Wickramaarachchige J. Lakshantha , Mangal S. Dhoubhadel , Tilo Reinert , Floyd D. McDaniel , Bibhudutta Rout
DOI: 10.1016/J.NIMB.2015.07.037
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摘要: … For the as-implanted samples, XPS shows formation of α-FeSi 2 structures in the samples. The Fe 2p 3/2 peak was positioned at the binding energy of 707.2 eV with the asymmetric …
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