Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching

摘要: Ultrasharp diamond tips make excellent atomic force microscopy probes, field emitters, and abrasive articles due to diamond’s outstanding physical properties, i.e., hardness, low friction coefficient, work function, toughness. Sharp are currently fabricated as individual or arrays by three principal methods: (1) focused ion beam milling gluing onto a cantilever of tips, (2) coating silicon with films, (3) molding into grooves etched in sacrificial substrate, bonding the substrate another electrodepositing handling chip, followed dissolution substrate. The first method is tedious serial nature but does produce very sharp second results whose radius limited thickness coating, while third involves costly release process difficulties thoroughly filling high aspect ratio apex groo...