作者: Manilal Gordhandas Rana , Donovan Collins
DOI:
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摘要: In order to minimize the amount of contaminants that pass through a pump, or are allowed accumulate therein, sub-atmospheric pressure gas scrubber suitable for use upstream vacuum pump is provided. The comprising vessel and means forming spray cleaning solvent within vessel, an inlet outlet be cleaned at sub atmospheric pressure, being arranged cause solvent, connected least one nozzle which used can pumped from using wherein recirculate back inlet.