Diamond turning and soft lithography processes for liquid tunable lenses

摘要: Making use of the capability high precision diamond turning in producing 3-dimensional free form optical surfaces with excellent surface finish, molds for various types liquid tunable microlenses are fabricated. Subsequently, a rapid prototyping process known as soft lithography is applied to fabricated mold replicate multiple lens structures. This method provides an efficient and reliable way generating rotationally symmetric that otherwise difficult produce conventional methods such etching methods. Using atomic force microscopy, white light interferometry mechanical profiler, it verified quality dimensional accuracy replicas preserved. We demonstrate practical usefulness proposed fabrication by developing experimentally testing three different lenses, namely (1) diffractive/refractive hybrid reduces chromatic aberration within visible spectrum, (2) double focusing (3) aspherical minimizes spherical aberration.