Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition

摘要: A solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, to form metal-containing films such as SrBi 2 Ta O 9 (SBT) memory devices. An SBT film may be formed using precursors Sr(thd) (pmdeta), Ta(OiPr) 4 (thd) and Bi(thd) 3 (pmdeta) which are dissolved in a medium comprising one or more alkanes. Specific alkane compositions advantageously used MOCVD compound(s) β-diketonate compounds complexes, including alkoxide ligands, alkyl and/or aryl groups at their outer (molecular) surface, other ligand coordination species specific constituents.