A fundamental analysis of the validity of thermodynamic models of ionized and excited particle production during sputtering

摘要: Abstract The concept of LTE and its existence criteria are applied to the sputtering problem. After presenting arguments against within solid, expressions derived which allow a calculation minimum secondary electron yields conditions required for establishment partial complete hemisphere or hemispherical shell immediately above point impact an incident, heavy projectile. It is found by application theory 50 keV Ar+ bombardment zinc that per incident projectile greater than 10s before either complete, partial, can be established during sputtering. Further refinements model not expected reduce this figure four more orders magnitude agreement with experimental yields. In event were possible, statistical cannot then validly such small numbers particles. physical basis Anderson an...